TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
Synonym(s):TEMAH;Tetrakis(ethylmethylamino)hafnium(IV)
- CAS NO.：352535-01-4
- Empirical Formula: C12H32HfN4
- Molecular Weight: 410.9
- MDL number: MFCD03427130
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-05-28 05:55:26
What is TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM?
The Uses of TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
Precursors Packaged for Depositions Systems
General Description
Atomic number of base material: 72 Hafnium
Properties of TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
| Melting point: | <-50 °C |
| Boiling point: | 79 °C0.1 mm Hg(lit.) |
| Density | 1.324 g/mL at 25 °C(lit.) |
| Flash point: | 52 °F |
| storage temp. | 2-8°C |
| form | liquid |
| color | colorless to yellow |
| Specific Gravity | 1.324 |
| Hydrolytic Sensitivity | 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required |
| Sensitive | Air & Moisture Sensitive |
| EPA Substance Registry System | Ethanamine, N-methyl-, hafnium(4+) salt (4:1) (352535-01-4) |
Safety information for TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02 |
| GHS Hazard Statements |
H225:Flammable liquids H260:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P223:Keep away from any possible contact with water, because of violent reaction and possible flash fire. P233:Keep container tightly closed. P240:Ground/bond container and receiving equipment. P241:Use explosion-proof electrical/ventilating/lighting/…/equipment. P231+P232:Handle under inert gas. Protect from moisture. |
Computed Descriptors for TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
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