TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)
- CAS NO.：19782-68-4
- Empirical Formula: C8H24HfN4
- Molecular Weight: 354.79
- MDL number: MFCD01862473
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-01-13 11:13:25
What is TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)?
The Uses of TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)
Used as precursor for atomic layer deposition of Hafnium Oxide nanolaminates, which are used as a reploacement for Silicon oxide in semiconductor devices.
General Description
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Properties of TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)
| Melting point: | 26-29 °C(lit.) |
| Boiling point: | 85°C/0.1mm |
| Density | 1.098 g/mL at 25 °C |
| Flash point: | 109 °F |
| form | crystal |
| Specific Gravity | 1.40 |
| color | colorless to pale yellow |
| Sensitive | moisture sensitive, store cold |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| CAS DataBase Reference | 19782-68-4 |
Safety information for TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Corrosion Corrosives GHS05 |
| GHS Hazard Statements |
H228:Flammable solids H261:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H314:Skin corrosion/irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas. Protect from moisture. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. P370+P378:In case of fire: Use … for extinction. P402+P404:Store in a dry place. Store in a closed container. |
Computed Descriptors for TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)
| InChIKey | ZYLGGWPMIDHSEZ-UHFFFAOYSA-N |
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