TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Synonym(s):TEMAZ;Tetrakis(ethylmethylamino)zirconium(IV)
- CAS NO.：175923-04-3
- Empirical Formula: C12H32N4Zr
- Molecular Weight: 323.63
- MDL number: MFCD03427131
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-05-28 02:23:00
What is TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM?
The Uses of TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Precursors Packaged for Depositions Systems
General Description
Atomic number of base material: 40 Zirconium
Properties of TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
| Boiling point: | 81 °C0.1 mm Hg(lit.) |
| Density | 1.049 g/mL at 25 °C(lit.) |
| Flash point: | 50 °F |
| form | liquid |
| Specific Gravity | 1.049 |
| color | light yellow |
| Sensitive | Air & Moisture Sensitive |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
Safety information for TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Exclamation Mark Irritant GHS07 |
| GHS Hazard Statements |
H225:Flammable liquids H261:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P231+P232:Handle under inert gas. Protect from moisture. P302+P352:IF ON SKIN: wash with plenty of soap and water. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
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