TETRAKIS(DIMETHYLAMINO)TITANIUM
Synonym(s):TDMAT;Tetrakis(dimethylamino)titanium(IV)
- CAS NO.：3275-24-9
- Empirical Formula: C2H7NTi
- Molecular Weight: 92.95
- MDL number: MFCD00014861
- EINECS: 221-904-3
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-01-13 11:17:24
What is TETRAKIS(DIMETHYLAMINO)TITANIUM?
Chemical properties
clear yellow to orange liquid
The Uses of TETRAKIS(DIMETHYLAMINO)TITANIUM
Precursors Packaged for Depositions Systems
The Uses of TETRAKIS(DIMETHYLAMINO)TITANIUM
Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).
General Description
Atomic number of base material: 22 Titanium
Properties of TETRAKIS(DIMETHYLAMINO)TITANIUM
| Melting point: | <4°C |
| Boiling point: | 50 °C0.5 mm Hg(lit.) |
| Density | 0.947 g/mL at 25 °C(lit.) |
| refractive index | 1.55 |
| Flash point: | -22 °F |
| storage temp. | Flammables area |
| form | liquid |
| color | yellow to orange |
| Specific Gravity | 0.96 |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| Sensitive | Moisture Sensitive |
| CAS DataBase Reference | 3275-24-9(CAS DataBase Reference) |
| NIST Chemistry Reference | Tetrakis(dimethylamino)titanium(3275-24-9) |
| EPA Substance Registry System | Methanamine, N-methyl-, titanium(4+) salt (3275-24-9) |
Safety information for TETRAKIS(DIMETHYLAMINO)TITANIUM
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Corrosion Corrosives GHS05 |
| GHS Hazard Statements |
H225:Flammable liquids H260:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H314:Skin corrosion/irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P223:Keep away from any possible contact with water, because of violent reaction and possible flash fire. P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas. Protect from moisture. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for TETRAKIS(DIMETHYLAMINO)TITANIUM
| InChIKey | MNWRORMXBIWXCI-UHFFFAOYSA-N |
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