TETRAKIS(DIMETHYLAMINO)ZIRCONIUM
Synonym(s):TDMAZ;Tetrakis(dimethylamino)zirconium(IV)
- CAS NO.：19756-04-8
- Empirical Formula: C8H24N4Zr
- Molecular Weight: 267.53
- MDL number: MFCD00239502
- EINECS: 629-068-5
- SAFETY DATA SHEET (SDS)
- Update Date: 2025-09-25 17:15:13
What is TETRAKIS(DIMETHYLAMINO)ZIRCONIUM?
Chemical properties
Pale yellow-greenish crystalline solid
The Uses of TETRAKIS(DIMETHYLAMINO)ZIRCONIUM
Precursors Packaged for Depositions Systems
The Uses of TETRAKIS(DIMETHYLAMINO)ZIRCONIUM
Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.
General Description
Atomic number of base material: 40 Zirconium
Properties of TETRAKIS(DIMETHYLAMINO)ZIRCONIUM
| Melting point: | 57-60 °C(lit.) |
| Boiling point: | 80°C 0,1mm |
| Flash point: | >65℃ |
| storage temp. | 2-8°C |
| form | solid |
| Sensitive | moisture sensitive, store cold |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
Safety information for TETRAKIS(DIMETHYLAMINO)ZIRCONIUM
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Exclamation Mark Irritant GHS07 |
| GHS Hazard Statements |
H228:Flammable solids H261:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P231+P232:Handle under inert gas. Protect from moisture. P302+P352:IF ON SKIN: wash with plenty of soap and water. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for TETRAKIS(DIMETHYLAMINO)ZIRCONIUM
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