TITANIUM SILICIDE
- CAS NO.：12067-57-1
- Empirical Formula: Si3Ti5
- Molecular Weight: 323.59
- MDL number: MFCD01310208
- EINECS: 235-082-9
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-05-28 01:14:27
What is TITANIUM SILICIDE?
Chemical properties
-325 mesh gray powder(s) [AES93]
The Uses of TITANIUM SILICIDE
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.
Properties of TITANIUM SILICIDE
| Melting point: | 2130°C |
| Density | 4.3 g/cm3 |
| form | -325 Mesh Powder |
| Resistivity | 55 (ρ/μΩ.cm) |
| Water Solubility | Soluble in hydrofluoric acid. Insoluble in water. |
| Crystal Structure | Hexagonal |
| EPA Substance Registry System | Titanium silicide (Ti5Si3) (12067-57-1) |
Safety information for TITANIUM SILICIDE
| Pictogram(s) |
 Flame Flammables GHS02  Exclamation Mark Irritant GHS07 |
| GHS Hazard Statements |
H228:Flammable solids H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P261:Avoid breathing dust/fume/gas/mist/vapours/spray. P280:Wear protective gloves/protective clothing/eye protection/face protection. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. P405:Store locked up. |
Computed Descriptors for TITANIUM SILICIDE
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