TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
Synonym(s):TBTDET;Tris(diethylamino)(tert-butylimino)tantalum(V)
- CAS NO.：169896-41-7
- Empirical Formula: C16H39N4Ta
- Molecular Weight: 468.46
- MDL number: MFCD02684506
- EINECS: 624-910-8
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-01-13 11:14:29
What is TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE?
The Uses of TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.
The Uses of TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
Tantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.
General Description
Atomic number of base material: 73 Tantalum
Properties of TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
| Boiling point: | 90°C/0.1mm |
| Density | 1.252 g/mL at 25 °C (lit.) |
| Flash point: | 115 °F |
| form | liquid |
| color | colorless to pale yellow |
| Specific Gravity | 1.252 |
| Water Solubility | Reacts with water. |
| Sensitive | Air Sensitive |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| CAS DataBase Reference | 169896-41-7 |
| EPA Substance Registry System | Tantalum, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-, (T-4)- (169896-41-7) |
Safety information for TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Corrosion Corrosives GHS05 |
| GHS Hazard Statements |
H226:Flammable liquids H261:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H314:Skin corrosion/irritation H318:Serious eye damage/eye irritation |
| Precautionary Statement Codes |
P223:Keep away from any possible contact with water, because of violent reaction and possible flash fire. P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas. Protect from moisture. P310:Immediately call a POISON CENTER or doctor/physician. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. P405:Store locked up. P422:Store contents under … |
Computed Descriptors for TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
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