PENTAKIS(DIMETHYLAMINO)TANTALUM
Synonym(s):PDMAT;Ta(NMe2)5;TADMA;Tantalum dimethylamide
- CAS NO.：19824-59-0
- Empirical Formula: C10H30N5Ta
- Molecular Weight: 401.33
- MDL number: MFCD01631286
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-01-13 11:13:15
What is PENTAKIS(DIMETHYLAMINO)TANTALUM?
What are the applications of Application
Pentakis(dimethylamino)tantalum(V) is a volatile solid CVD precursor to tantalum nitride thin films
General Description
Atomic number of base material: 73 Tantalum
Properties of PENTAKIS(DIMETHYLAMINO)TANTALUM
| Melting point: | 100 °C (dec.)(lit.) |
| Boiling point: | 100°C 0,1mm |
| form | crystal |
| color | orange |
| Sensitive | moisture sensitive |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| CAS DataBase Reference | 19824-59-0 |
Safety information for PENTAKIS(DIMETHYLAMINO)TANTALUM
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Corrosion Corrosives GHS05 |
| GHS Hazard Statements |
H228:Flammable solids H260:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H314:Skin corrosion/irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P260:Do not breathe dust/fume/gas/mist/vapours/spray. P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas. Protect from moisture. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for PENTAKIS(DIMETHYLAMINO)TANTALUM
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