HAFNIUM TERT-BUTOXIDE
Synonym(s):Hafnium tetrakis(tert -butoxide);Hafnium tetrakis(t -butoxide);Hafnium tetra-t -butoxide;Hafnium(IV) tert -butoxide;Tetra-tert -butoxyhafnium
- CAS NO.：2172-02-3
- Empirical Formula: C16H36HfO4
- Molecular Weight: 470.94
- MDL number: MFCD00070458
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-01-13 11:21:34
What is HAFNIUM TERT-BUTOXIDE?
The Uses of HAFNIUM TERT-BUTOXIDE
Hafnium tert-butoxide [Hf(OtBu)4] is a mononuclear; volatile; and highly promising precursor for the deposition of HfO2 and other hafnium doped thin films by vapor deposition techniques. The deposited films show high dielectric constant suitable for semiconductor devices.
General Description
Atomic number of base material: 72 Hafnium
Properties of HAFNIUM TERT-BUTOXIDE
| Melting point: | 2℃ |
| Boiling point: | 90 °C5 mm Hg(lit.) |
| Density | 1.166 g/mL at 25 °C(lit.) |
| refractive index | n |
| Flash point: | 83 °F |
| solubility | Soluble in hydrocarbons, reacts with alcohols, ketones, and esters |
| form | Liquid |
| Specific Gravity | 1.166 |
| Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
| Sensitive | Moisture Sensitive/Light Sensitive |
| Exposure limits | ACGIH: TWA 0.5 mg/m3 NIOSH: IDLH 50 mg/m3; TWA 0.5 mg/m3 |
| CAS DataBase Reference | 2172-02-3(CAS DataBase Reference) |
Safety information for HAFNIUM TERT-BUTOXIDE
| Signal word | Warning |
| Pictogram(s) |
 Flame Flammables GHS02  Exclamation Mark Irritant GHS07 |
| GHS Hazard Statements |
H226:Flammable liquids H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P302+P352:IF ON SKIN: wash with plenty of soap and water. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for HAFNIUM TERT-BUTOXIDE
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