2,2,4,4,6,6-Hexamethylcyclotrisilazane

CAS NO.：1009-93-4
Empirical Formula: C6H21N3Si3
Molecular Weight: 219.51
MDL number: MFCD00039698
EINECS: 213-773-6
SAFETY DATA SHEET (SDS)
Update Date: 2026-05-27 23:45:06

What is 2,2,4,4,6,6-Hexamethylcyclotrisilazane?

Description

2,2,4,4,6,6-Hexamethylcyclotrisilazane is a colorless liquid that is soluble in water. It has an odor similar to ether and a boiling point of about 100 degrees Celsius. The chemical formula for this compound is CH3(CH2)6SiCl6. 2,2,4,4,6,6-Hexamethylcyclotrisilazane has been used as a solvent for producing polymers and as a reagent for organic synthesis. It may also be used as a precursor to silicon dioxide nanoparticles used in producing semiconductors and solar cells. 2,2,4,4,6,6-Hexamethylcyclotrisilazane reacts with hydrochloric acid to produce hydrogen chloride gas and zirconium oxide. It also reacts with sodium citrate in the presence of fatty acids to form an ester product called methyl eth.

Chemical properties

clear colorless liquid

Hazard

Moderately toxic by ingestion.

Flammability and Explosibility

Flammable

Purification Methods

Purify it by fractional distillation at atmospheric pressure until the temperature reaches 200o. It is moisture sensitive. The residue in the flask is mostly octamethylcyclotetrasilazane. [Brewer & Haber J Am Chem Soc 70 3888 1948, Beilstein 4 III 1887.]

Properties of 2,2,4,4,6,6-Hexamethylcyclotrisilazane

Melting point:	−10 °C(lit.)
Boiling point:	188 °C756 mm Hg(lit.)
Density	0.92 g/mL at 25 °C(lit.)
vapor pressure	35Pa at 25℃
refractive index	n20/D 1.445(lit.)
Flash point:	139 °F
Water Solubility	Decomposes in contact with water,Insoluble in water
form	liquid
pka	14.76±0.20(Predicted)
Specific Gravity	0.922
color	colorless
Hydrolytic Sensitivity	7: reacts slowly with moisture/water
BRN	774739
CAS DataBase Reference	1009-93-4(CAS DataBase Reference)
NIST Chemistry Reference	Hexamethylcyclotrisilazane(1009-93-4)
EPA Substance Registry System	Cyclotrisilazane, 2,2,4,4,6,6-hexamethyl- (1009-93-4)

Safety information for 2,2,4,4,6,6-Hexamethylcyclotrisilazane

Signal word	Warning
Pictogram(s)	Flame Flammables GHS02 Exclamation Mark Irritant GHS07
GHS Hazard Statements	H226:Flammable liquids H302:Acute toxicity,oral H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation
Precautionary Statement Codes	P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P233:Keep container tightly closed. P240:Ground/bond container and receiving equipment. P301+P312:IF SWALLOWED: call a POISON CENTER or doctor/physician IF you feel unwell. P302+P352:IF ON SKIN: wash with plenty of soap and water. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.