TETRAKIS(TRIMETHYLSILOXY)SILANE
- CAS NO.：3555-47-3
- Empirical Formula: C12H36O4Si5
- Molecular Weight: 384.84
- MDL number: MFCD00051587
- EINECS: 222-613-4
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-05-28 01:59:01
What is TETRAKIS(TRIMETHYLSILOXY)SILANE?
Chemical properties
Colorless liquid
The Uses of TETRAKIS(TRIMETHYLSILOXY)SILANE
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.
What are the applications of Application
Tetrakis(trimethylsilyloxy)silane is a silicon compound with potential use for biochemical research
Flammability and Explosibility
Not classified
Properties of TETRAKIS(TRIMETHYLSILOXY)SILANE
| Melting point: | -60 °C |
| Boiling point: | 103-106 °C/2 mmHg (lit.) |
| Density | 0.87 g/mL at 25 °C (lit.) |
| vapor pressure | 27.4hPa at 20℃ |
| refractive index | n |
| Flash point: | 169 °F |
| storage temp. | Inert atmosphere,Room Temperature |
| form | liquid |
| color | Colorless to Almost colorless |
| Specific Gravity | 0.868 |
| Water Solubility | 150.7ng/L at 23℃ |
| Hydrolytic Sensitivity | 4: no reaction with water under neutral conditions |
| BRN | 1793898 |
| EPA Substance Registry System | Tetrakis(trimethylsiloxy)silane (3555-47-3) |
Safety information for TETRAKIS(TRIMETHYLSILOXY)SILANE
| Signal word | Warning |
| Pictogram(s) |
 Exclamation Mark Irritant GHS07 |
| GHS Hazard Statements |
H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation |
| Precautionary Statement Codes |
P261:Avoid breathing dust/fume/gas/mist/vapours/spray. P264:Wash hands thoroughly after handling. P264:Wash skin thouroughly after handling. P271:Use only outdoors or in a well-ventilated area. P280:Wear protective gloves/protective clothing/eye protection/face protection. P302+P352:IF ON SKIN: wash with plenty of soap and water. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for TETRAKIS(TRIMETHYLSILOXY)SILANE
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