Lithium tantalum ethoxide
- CAS NO.：127503-04-2
- Empirical Formula: C12H30LiO6Ta
- Molecular Weight: 458.25
- MDL number: MFCD00210630
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-09-12 18:51:26
What is Lithium tantalum ethoxide?
The Uses of Lithium tantalum ethoxide
Lithium tantalum ethoxide is a precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods.
Properties of Lithium tantalum ethoxide
| Boiling point: | 230°C/0.2mm |
| Flash point: | 230°C/0.2mm |
| form | Liquid |
| color | Pale yellow |
| Water Solubility | Decomposes in water. |
| Sensitive | Moisture Sensitive |
| Exposure limits | ACGIH: STEL 1000 ppm OSHA: TWA 1000 ppm(1900 mg/m3) NIOSH: IDLH 3300 ppm; TWA 1000 ppm(1900 mg/m3) |
Safety information for Lithium tantalum ethoxide
| Pictogram(s) |
 Flame Flammables GHS02 |
| GHS Hazard Statements |
H225:Flammable liquids |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P240:Ground/bond container and receiving equipment. P241:Use explosion-proof electrical/ventilating/lighting/…/equipment. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. |
Computed Descriptors for Lithium tantalum ethoxide
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