Tantalum(V) ethoxide

Synonym(s):PET;Pentaethoxytantalum;Tantalum pentaethoxide;Tantalum(V) ethoxide;Tantalum ethylate

CAS NO.：6074-84-6
Empirical Formula: C10H25O5Ta
Molecular Weight: 406.25
MDL number: MFCD00049785
EINECS: 228-010-2
SAFETY DATA SHEET (SDS)
Update Date: 2026-01-13 11:25:47

What is Tantalum(V) ethoxide?

Chemical properties

clear colorless to almost colorless liquid or

The Uses of Tantalum(V) ethoxide

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

The Uses of Tantalum(V) ethoxide

Tantalum(V) ethoxide acts as a precursor used in the preparation of ultra thin films of tantalum oxide and other tantalum containing films, which finds application in semiconductors. It is also used to prepare tantalum oxide nanoparticles for the imaging cartilage.

General Description

Tantalum(V) ethoxide Ta(OC₂H₅)₅ is a tantalum alkoxide that can be used as a precursor in the preparation of tantalum oxide by chemical vapor deposition (CVD). It has excellent volatility and thermal stability. It can be synthesized by anodic oxidation of tantalum plate in anhydrous ethanol.

Purification Methods

Purify it by distillation under reduced pressure. It aggregates in *C6H6,EtOH, MeCN, pyridine and diisopropyl ether. [Bradley et al. J Chem Soc 726 1955, Bradley et al. J Chem Soc 5 1956, Beilstein 1 IV 1312.]

Properties of Tantalum(V) ethoxide

Melting point:	21 °C(lit.)
Boiling point:	155 °C0.01 mm Hg(lit.)
Density	1.566 g/mL at 25 °C(lit.)
refractive index	n20/D 1.487(lit.)
Flash point:	87 °F
storage temp.	2-8°C
solubility	Soluble in organic solvents.
form	liquid
Specific Gravity	1.56
Water Solubility	Decomposes in water. Soluble in organic solvents.
Sensitive	Moisture Sensitive/Air Sensitive
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
BRN	3678999
CAS DataBase Reference	6074-84-6(CAS DataBase Reference)
EPA Substance Registry System	Ethanol, tantalum(5+) salt (6074-84-6)

Safety information for Tantalum(V) ethoxide

Signal word	Warning
Pictogram(s)	Flame Flammables GHS02
GHS Hazard Statements	H226:Flammable liquids
Precautionary Statement Codes	P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P233:Keep container tightly closed. P240:Ground/bond container and receiving equipment. P241:Use explosion-proof electrical/ventilating/lighting/…/equipment. P242:Use only non-sparking tools. P243:Take precautionary measures against static discharge.