1,2,3,4-Tetrachlorohexafluorobutane

CAS NO.：375-45-1
Empirical Formula: C4Cl4F6
Molecular Weight: 303.85
MDL number: MFCD00040135
EINECS: 938-148-1
SAFETY DATA SHEET (SDS)
Update Date: 2026-05-28 04:24:32

What is 1,2,3,4-Tetrachlorohexafluorobutane?

The Uses of 1,2,3,4-Tetrachlorohexafluorobutane

1,2,3,4-tetrachloro-hexafluoro-butane, also known as A316, is used as an intermediate compound in the synthesis of hexafluoro-1,3-butadiene (also known as C4F6 or HFBD), a stable gas which is used in the semiconductor industry, in particular as etching gas for semiconductor fine processing.

Flammability and Explosibility

Non flammable

References

[1] Emanuela, Antenucci , et al. "PROCESSES FOR THE SYNTHESIS OF 1,2,3,4-TETRACHLORO-HEXAFLUORO-BUTANE.", WO2016193248A1.

Properties of 1,2,3,4-Tetrachlorohexafluorobutane

Boiling point:	134-135°C
Density	1.72[at 20℃]
color	Clear, colourless
InChI	InChI=1S/C4Cl4F6/c5-1(9,3(7,11)12)2(6,10)4(8,13)14

Safety information for 1,2,3,4-Tetrachlorohexafluorobutane

Signal word	Warning
Pictogram(s)	Exclamation Mark Irritant GHS07
GHS Hazard Statements	H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation
Precautionary Statement Codes	P261:Avoid breathing dust/fume/gas/mist/vapours/spray. P271:Use only outdoors or in a well-ventilated area. P280:Wear protective gloves/protective clothing/eye protection/face protection.