Tris(dimethylamino)silane
Synonym(s):TDMAS;Tris(dimethylamino)silane;Tris(dimethylamido)silane;(Me2N)3SiH;N,N,N′,N′,N′′, N′′-Hexamethylsilanetriamine
- CAS NO.：15112-89-7
- Empirical Formula: C6H19N3Si
- Molecular Weight: 161.32
- MDL number: MFCD00048006
- EINECS: 239-165-0
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-10-27 18:05:17
What is Tris(dimethylamino)silane?
The Uses of Tris(dimethylamino)silane
Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.
General Description
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Properties of Tris(dimethylamino)silane
| Melting point: | <0°C |
| Boiling point: | 145 °C |
| Density | 0,838 g/cm3 |
| refractive index | 1.4247 |
| Flash point: | 25°C |
| form | liquid |
| pka | 10.93±0.70(Predicted) |
| color | colorless to light yellow |
| Specific Gravity | 0.84 |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| Sensitive | air sensitive, moisture sensitive |
| EPA Substance Registry System | N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7) |
Safety information for Tris(dimethylamino)silane
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Corrosion Corrosives GHS05  Skull and Crossbones Acute Toxicity GHS06 |
| GHS Hazard Statements |
H225:Flammable liquids H261:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H302:Acute toxicity,oral H311:Acute toxicity,dermal H314:Skin corrosion/irritation H330:Acute toxicity,inhalation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas. Protect from moisture. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for Tris(dimethylamino)silane
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