TANTALUM NITRIDE
- CAS NO.:12033-62-4
- Empirical Formula: NTa
- Molecular Weight: 194.95
- MDL number: MFCD00049568
- EINECS: 234-788-4
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-03-31 17:23:25
What is TANTALUM NITRIDE?
Chemical properties
Hexagonal, brown, bronze, or black crystals. Insoluble in water; slightly soluble in aqua regia, nitric acid, hydrogen fluoride.
Physical properties
Bronze or black crystals. Transition temperature 1.8 K. Insoluble in water, slowly attacked by aqua regia, HF, and HNO3.
The Uses of TANTALUM NITRIDE
Tantalum nitride is used to create barrier or "glue" layers between copper, or other conductive metals, and dielectric insulator films such as thermal oxides. These films are deposited on top of silicon wafers during the manufacture of integrated circuits, to create thin film surface mount resistors and has other electronic applications.
Production Methods
Tantalum nitride, TaN, is produced by direct synthesis of the elements at 1,100 °C (2,012 °F). Very pure TaN has been produced by spontaneous reaction of lithium amide, LiNH2, and TaCl5 . The compound is often added to cermets in 3–18 wt %. Ta3N5 is used as a red pigment in plastics and paints.
Properties of TANTALUM NITRIDE
| Melting point: | 3360°C |
| Density | 14.6 g/cm3 |
| solubility | insoluble in H2O; slightly soluble in aquaregia; reacts with alkaline solutions |
| form | Powder |
| color | black hexagonal, hexane crystals, crystalline |
| Resistivity | 128–135 (ρ/μΩ.cm) |
| Water Solubility | Insoluble in water. |
| Crystal Structure | Hexagonal |
| CAS DataBase Reference | 12033-62-4(CAS DataBase Reference) |
| EPA Substance Registry System | Tantalum nitride (TaN) (12033-62-4) |
Safety information for TANTALUM NITRIDE
Computed Descriptors for TANTALUM NITRIDE
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