Ethoxytrimethylsilane
Synonym(s):Ethoxytrimethylsilane;Trimethylethoxysilane
- CAS NO.：1825-62-3
- Empirical Formula: C5H14OSi
- Molecular Weight: 118.25
- MDL number: MFCD00009069
- EINECS: 217-370-6
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-05-28 06:31:32
What is Ethoxytrimethylsilane?
Chemical properties
clear colorless liquid
The Uses of Ethoxytrimethylsilane
Ethoxytrimethylsilane is also called Trimethylethoxysilane, an intermediate useful for blocking hydroxyl or amino groups to perform reactions on multi-functional organic compounds or polymers. It is also useful for deactivating glass surfaces used in gas chromatographic applications.
The Uses of Ethoxytrimethylsilane
Ethoxytrimethylsilane is used in preparation method of solvent-free heavy peeling regulator for silicon release.
General Description
Ethoxytrimethylsilane (ETMS) is an alkoxysilane that is used as a capping agent, which can tune the hydrophobic properties for a variety of substrates by coupling with the surface hydroxyl groups.
Properties of Ethoxytrimethylsilane
| Melting point: | -83°C |
| Boiling point: | 75-76 °C(lit.) |
| Density | 0.757 g/mL at 25 °C(lit.) |
| vapor pressure | 533 hPa (56 °C) |
| refractive index | n |
| Flash point: | -18 °C |
| storage temp. | Store below +30°C. |
| form | Liquid |
| color | Clear colorless |
| Specific Gravity | 0.757 |
| explosive limit | 1.5-16.5%(V) |
| Water Solubility | reacts |
| Sensitive | Moisture Sensitive |
| Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
| BRN | 1731950 |
| Dielectric constant | 3.0099999999999998 |
| CAS DataBase Reference | 1825-62-3(CAS DataBase Reference) |
| NIST Chemistry Reference | Silane, ethoxytrimethyl-(1825-62-3) |
| EPA Substance Registry System | Trimethylethoxysilane (1825-62-3) |
Safety information for Ethoxytrimethylsilane
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Exclamation Mark Irritant GHS07 |
| GHS Hazard Statements |
H225:Flammable liquids H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P302+P352:IF ON SKIN: wash with plenty of soap and water. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for Ethoxytrimethylsilane
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