DIETHYLSILANE
- CAS NO.：542-91-6
- Empirical Formula: C4H12Si
- Molecular Weight: 88.22
- MDL number: MFCD00039877
- EINECS: 208-834-9
- SAFETY DATA SHEET (SDS)
- Update Date: 2026-05-28 04:30:51
What is DIETHYLSILANE?
The Uses of DIETHYLSILANE
Diethylsilane is used as a precursor to prepare (3-allylsulfanyl-propyl)-diethyl-silane by using (Ph3P)3RhCl as reagent. It is also used in the chemical vapor deposition of SiO2 for microelectronics.
What are the applications of Application
Used in the ‘in-situ’ preparation of diborane and haloboranes.
Properties of DIETHYLSILANE
| Melting point: | -132°C |
| Boiling point: | 56 °C (lit.) |
| Density | 0.681 g/mL at 25 °C (lit.) |
| refractive index | n |
| Flash point: | −20 °F |
| storage temp. | under inert gas (nitrogen or Argon) at 2-8°C |
| solubility | Miscible with terahydrofuran, diethyl ether, 1,4-dioxane and benzene. |
| form | liquid |
| Specific Gravity | 0.683 |
| Hydrolytic Sensitivity | 3: reacts with aqueous base |
| Sensitive | Air Sensitive |
| Merck | 14,3128 |
| BRN | 1730902 |
| CAS DataBase Reference | 542-91-6(CAS DataBase Reference) |
| EPA Substance Registry System | Silane, diethyl- (542-91-6) |
Safety information for DIETHYLSILANE
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02 |
| GHS Hazard Statements |
H225:Flammable liquids |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. |
Computed Descriptors for DIETHYLSILANE
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